Showing results 1 to 3 of 3
Scheduling dual-armed cluster tools with cleaning processes Kim, Hee-Jung; Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.51, no.12, pp.3671 - 3687, 2013-06 |
Scheduling In-Line Multiple Cluster Tools Kim, Hyunjung; Lee, Jun-Ho; Baik, Sunhee; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.28, no.2, pp.171 - 179, 2015-05 |
Scheduling start-up and close-down periods of dual-armed cluster tools with wafer delay regulation Kim, Tae-Kyu; Jung, Chihyun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.50, no.10, pp.2785 - 2795, 2012 |
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