DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, EC | ko |
dc.contributor.author | Choi, YS | ko |
dc.contributor.author | Yoon, JB | ko |
dc.contributor.author | Hong, Songcheol | ko |
dc.contributor.author | Yoon, E | ko |
dc.date.accessioned | 2007-09-19T08:11:00Z | - |
dc.date.available | 2007-09-19T08:11:00Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-01 | - |
dc.identifier.citation | IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, v.51, no.1, pp.289 - 296 | - |
dc.identifier.issn | 0018-9480 | - |
dc.identifier.uri | http://hdl.handle.net/10203/1499 | - |
dc.description.abstract | We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-mum mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs. | - |
dc.description.sponsorship | This work was performed as part of the National Research Laboratory Program of the Ministry of Science and Technology. | en |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | SILICON | - |
dc.subject | OSCILLATORS | - |
dc.subject | BAND | - |
dc.title | Fully integrated low phase-noise VCOs with on-chip MEMS inductors | - |
dc.type | Article | - |
dc.identifier.wosid | 000180296600005 | - |
dc.identifier.scopusid | 2-s2.0-0037256878 | - |
dc.type.rims | ART | - |
dc.citation.volume | 51 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 289 | - |
dc.citation.endingpage | 296 | - |
dc.citation.publicationname | IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Hong, Songcheol | - |
dc.contributor.nonIdAuthor | Park, EC | - |
dc.contributor.nonIdAuthor | Choi, YS | - |
dc.contributor.nonIdAuthor | Yoon, JB | - |
dc.contributor.nonIdAuthor | Yoon, E | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | CMOS compatible | - |
dc.subject.keywordAuthor | inductor | - |
dc.subject.keywordAuthor | microelectromechanical system (MEMS) | - |
dc.subject.keywordAuthor | monolithic integration | - |
dc.subject.keywordAuthor | phase noise | - |
dc.subject.keywordAuthor | voltage-controlled oscillator (VCO) | - |
dc.subject.keywordPlus | SILICON | - |
dc.subject.keywordPlus | OSCILLATORS | - |
dc.subject.keywordPlus | BAND | - |
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