Material Characterization of Thin Film in MEMS Structures

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dc.contributor.authorLee, Soon-Bok-
dc.date.accessioned2013-03-18T15:34:29Z-
dc.date.available2013-03-18T15:34:29Z-
dc.date.created2012-02-06-
dc.date.issued2004-
dc.identifier.citationMicro- Nano (includes Bio-) Technology, UM-KAIST Joint Workshop, v., no., pp.1 - 20-
dc.identifier.urihttp://hdl.handle.net/10203/149799-
dc.languageKOR-
dc.titleMaterial Characterization of Thin Film in MEMS Structures-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage1-
dc.citation.endingpage20-
dc.citation.publicationnameMicro- Nano (includes Bio-) Technology, UM-KAIST Joint Workshop-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorLee, Soon-Bok-
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ME-Conference Papers(학술회의논문)
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