Material Characterization of Thin Film in MEMS Structures
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Soon-Bok | - |
| dc.date.accessioned | 2013-03-18T15:34:29Z | - |
| dc.date.available | 2013-03-18T15:34:29Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004 | - |
| dc.identifier.citation | Micro- Nano (includes Bio-) Technology, UM-KAIST Joint Workshop, v., no., pp.1 - 20 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/149799 | - |
| dc.language | KOR | - |
| dc.title | Material Characterization of Thin Film in MEMS Structures | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 1 | - |
| dc.citation.endingpage | 20 | - |
| dc.citation.publicationname | Micro- Nano (includes Bio-) Technology, UM-KAIST Joint Workshop | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Lee, Soon-Bok | - |
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- ME-Conference Papers(학술회의논문)
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