Improvement of Temperature Induced Measuring Error in the Positioning Error Measurement of the Ultra Precision Stages
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hwang, J.H. | - |
| dc.contributor.author | Park, C.H. | - |
| dc.contributor.author | Lee, C.H. | - |
| dc.contributor.author | Kim, Seung-Woo | - |
| dc.date.accessioned | 2013-03-18T12:56:17Z | - |
| dc.date.available | 2013-03-18T12:56:17Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2003-11-03 | - |
| dc.identifier.citation | International Conference on Leading Edge Manufacturing in 21st Century, v., no., pp.541 - 541 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/148567 | - |
| dc.language | ENG | - |
| dc.title | Improvement of Temperature Induced Measuring Error in the Positioning Error Measurement of the Ultra Precision Stages | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 541 | - |
| dc.citation.endingpage | 541 | - |
| dc.citation.publicationname | International Conference on Leading Edge Manufacturing in 21st Century | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.nonIdAuthor | Hwang, J.H. | - |
| dc.contributor.nonIdAuthor | Park, C.H. | - |
| dc.contributor.nonIdAuthor | Lee, C.H. | - |
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