DC Field | Value | Language |
---|---|---|
dc.contributor.author | Sang-Won Kang | - |
dc.date.accessioned | 2013-03-18T12:51:57Z | - |
dc.date.available | 2013-03-18T12:51:57Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006 | - |
dc.identifier.citation | AVS 6th International Conference on Atomic Layer Deposition, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/148535 | - |
dc.language | ENG | - |
dc.title | Improvement of Dielectric Properties of PEALD SrTiO3 Thin Films by Insertion SrO Interlayer on Ru Bottom Electrode | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | AVS 6th International Conference on Atomic Layer Deposition | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | Sang-Won Kang | - |
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