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College of Engineering(공과대학)Dept. of Nuclear and Quantum Engineering(원자력및양자공학과)NE-Conference Papers(학술회의논문)

Discharge mode characteristics of atmospheric RF capacitive discharge

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Moon, SY / KIM, DB / Rhee, JK / Choe, Wonhoresearcher
Issue Date
2005-11
Language
ENG
Citation

27th International Symposium on Dry Process

URI
http://hdl.handle.net/10203/146993
Appears in Collection
NE-Conference Papers(학술회의논문)
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