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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Advancement of white-light interferometry for 3-D profile metrology of micro-structured surfaces

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dc.contributor.authorKim, Seung-Woo-
dc.contributor.authorGhim, YS-
dc.date.accessioned2013-03-18T09:05:30Z-
dc.date.available2013-03-18T09:05:30Z-
dc.date.created2012-02-06-
dc.date.issued2005-10-
dc.identifier.citationkspe, v., no., pp.39 - 46-
dc.identifier.urihttp://hdl.handle.net/10203/146820-
dc.languageENG-
dc.titleAdvancement of white-light interferometry for 3-D profile metrology of micro-structured surfaces-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage39-
dc.citation.endingpage46-
dc.citation.publicationnamekspe-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorGhim, YS-
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ME-Conference Papers(학술회의논문)
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