Comparison of structural properties of ZnO films on Si3N4/SiO2/Si (100) and SiO2/Si (100) grown by RF magnetron sputtering
- Issue Date
- 2006-10-19
- Language
- KOR
- Citation
한국물리학회 2006 가을 학술논문발표회 및 임시총회
- Appears in Collection
- MS-Conference Papers(학술회의논문)
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