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New Substrate Platform for Metal-Gate/High-k Gate Dielectric MOSFET Integration and RF Technology up to 100 GHzNew Substrate Platform for Metal-Gate/High-k Gate Dielectric MOSFET Integration and RF Technology up to 100 GHz

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Cho, Byung Jinresearcher / Chin, A / Mei, P / Zhu, C / Li, MF / Lee, S / Yoo, WJ
Issue Date
2003-11-13
Language
ENG
Citation

Advanced Crystal Growth Conference and 2003 International Symposium on Substrate Engineering, pp.0 - 0

URI
http://hdl.handle.net/10203/146367
Appears in Collection
EE-Conference Papers(학술회의논문)
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