DC Field | Value | Language |
---|---|---|
dc.contributor.author | 노광수 | - |
dc.contributor.author | 김지윤 | - |
dc.contributor.author | 김윤석 | - |
dc.contributor.author | Bhlmann, Simon | - |
dc.contributor.author | 홍승범 | - |
dc.date.accessioned | 2013-03-18T07:43:29Z | - |
dc.date.available | 2013-03-18T07:43:29Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-10-19 | - |
dc.identifier.citation | 한국세라믹학회 추계학술대회, v., no., pp.0 - 0 | - |
dc.identifier.uri | http://hdl.handle.net/10203/146134 | - |
dc.language | KOR | - |
dc.publisher | 한국세라믹학회 | - |
dc.title | 강유전체 박막 증착을 위한 Pt 하부 전극 제조 및 응력 분석 (Fabrication and stress analysis of Pt bottom electrode for ferroelectric thin film | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 0 | - |
dc.citation.endingpage | 0 | - |
dc.citation.publicationname | 한국세라믹학회 추계학술대회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 노광수 | - |
dc.contributor.nonIdAuthor | 김지윤 | - |
dc.contributor.nonIdAuthor | 김윤석 | - |
dc.contributor.nonIdAuthor | Bhlmann, Simon | - |
dc.contributor.nonIdAuthor | 홍승범 | - |
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