강유전체 박막 증착을 위한 Pt 하부 전극 제조 및 응력 분석 (Fabrication and stress analysis of Pt bottom electrode for ferroelectric thin film
- Publisher
- 한국세라믹학회
- Issue Date
- 2006-10-19
- Language
- KOR
- Citation
한국세라믹학회 추계학술대회, pp.0 - 0
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.