DC Field | Value | Language |
---|---|---|
dc.contributor.author | 배귀남 | ko |
dc.contributor.author | 박승오 | ko |
dc.contributor.author | 이춘식 | ko |
dc.contributor.author | 안이기 | ko |
dc.date.accessioned | 2009-12-10T08:49:06Z | - |
dc.date.available | 2009-12-10T08:49:06Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1994-01 | - |
dc.identifier.citation | 대한기계학회논문집 A, v.18, no.1, pp.175 - 183 | - |
dc.identifier.issn | 1226-4873 | - |
dc.identifier.uri | http://hdl.handle.net/10203/14600 | - |
dc.description.abstract | To investigate thermophoretic effect on particle deposition, average deposition velocity toward a horizontal wafer surface in vertical airflow is measured keeping the wafer surface temperature different from the surrounding air temperature. In the present measurement, the temperature difference is maintained in the range from -10 to 4℃. Polystyrene latex (PSL) sphere of diameter between 0.3 and 0.8 μm are used for the experiment. The number of particles deposited on a wafer surface is estimated from the measurements using a wafer surface scanner (PMS SAS-3600). Experimental data are compared with prediction model results. | - |
dc.language | Korean | - |
dc.language.iso | ko | en |
dc.publisher | 대한기계학회 | - |
dc.title | 열영동력이 수평 웨이퍼상의 입자침착에 미치는 영향 | - |
dc.title.alternative | Thermophoretic Effect on Particle Deposition Toward a Horizontal Wafer | - |
dc.type | Article | - |
dc.subject.alternative | Particle Deposition Velocity | en |
dc.subject.alternative | Thermophoresis | en |
dc.subject.alternative | Horizontal Wafer | en |
dc.type.rims | ART | - |
dc.citation.volume | 18 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 175 | - |
dc.citation.endingpage | 183 | - |
dc.citation.publicationname | 대한기계학회논문집 A | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | 박승오 | - |
dc.contributor.nonIdAuthor | 배귀남 | - |
dc.contributor.nonIdAuthor | 이춘식 | - |
dc.contributor.nonIdAuthor | 안이기 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.