Design and control of high precision X-Y-Theta stage using VCM
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Gweon, Dae-Gab | - |
| dc.date.accessioned | 2013-03-18T07:09:41Z | - |
| dc.date.available | 2013-03-18T07:09:41Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004-11-03 | - |
| dc.identifier.citation | 2nd International Symposium on Nano-manufacturing, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/145855 | - |
| dc.language | ENG | - |
| dc.title | Design and control of high precision X-Y-Theta stage using VCM | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2nd International Symposium on Nano-manufacturing | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Gweon, Dae-Gab | - |
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