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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Demonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate StackDemonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate Stack

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dc.contributor.authorCho, Byung Jin-
dc.contributor.authorPark, CS-
dc.contributor.authorSong, SC-
dc.contributor.authorBersuker, G-
dc.contributor.authorAlshareef, HN-
dc.contributor.authorJu, BS-
dc.contributor.authorMajhi-
dc.date.accessioned2013-03-18T06:08:56Z-
dc.date.available2013-03-18T06:08:56Z-
dc.date.created2012-02-06-
dc.date.issued2006-09-12-
dc.identifier.citation2006 International Conference on Solid State Devices and Materials (SSDM 2006), v., no., pp.0 - 0-
dc.identifier.urihttp://hdl.handle.net/10203/145440-
dc.languageENG-
dc.titleDemonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate Stack-
dc.title.alternativeDemonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate Stack-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage0-
dc.citation.endingpage0-
dc.citation.publicationname2006 International Conference on Solid State Devices and Materials (SSDM 2006)-
dc.identifier.conferencecountryJapan-
dc.identifier.conferencecountryJapan-
dc.contributor.localauthorCho, Byung Jin-
dc.contributor.nonIdAuthorPark, CS-
dc.contributor.nonIdAuthorSong, SC-
dc.contributor.nonIdAuthorBersuker, G-
dc.contributor.nonIdAuthorAlshareef, HN-
dc.contributor.nonIdAuthorJu, BS-
dc.contributor.nonIdAuthorMajhi-
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EE-Conference Papers(학술회의논문)
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