DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Byung Jin | - |
dc.contributor.author | Hwang, WS | - |
dc.contributor.author | Yoo, WJ | - |
dc.contributor.author | Chan, DSH | - |
dc.date.accessioned | 2013-03-18T06:08:45Z | - |
dc.date.available | 2013-03-18T06:08:45Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-11-12 | - |
dc.identifier.citation | AVS 53rd International Symposium, v., no., pp.0 - 0 | - |
dc.identifier.uri | http://hdl.handle.net/10203/145439 | - |
dc.language | ENG | - |
dc.title | Effects of Low Energy Nitrogen Plasma on the Removal of HfSiON | - |
dc.title.alternative | Effects of Low Energy Nitrogen Plasma on the Removal of HfSiON | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 0 | - |
dc.citation.endingpage | 0 | - |
dc.citation.publicationname | AVS 53rd International Symposium | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Cho, Byung Jin | - |
dc.contributor.nonIdAuthor | Hwang, WS | - |
dc.contributor.nonIdAuthor | Yoo, WJ | - |
dc.contributor.nonIdAuthor | Chan, DSH | - |
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