DSpace at KOASAS: Study on thermomechanical properties of NiTi thin film for MEMS application

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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Study on thermomechanical properties of NiTi thin film for MEMS application

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Hong, Soon Hyung researcher

Publisher: 대한기계학회

Issue Date: 2003-08-01

Language: KOR

Citation: 대한기계학회 2003년도 재료 및 파괴부문 추계학술대회, pp.54 - 56

URI: http://hdl.handle.net/10203/145249

Appears in Collection: MS-Conference Papers(학술회의논문)

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