DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Byung Jin | - |
dc.contributor.author | Park, CS | - |
dc.contributor.author | Tang, LJ | - |
dc.contributor.author | Wang, W | - |
dc.contributor.author | Kwong, DL | - |
dc.date.accessioned | 2013-03-18T05:02:15Z | - |
dc.date.available | 2013-03-18T05:02:15Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004-09-14 | - |
dc.identifier.citation | Conf. on Solid State Devices and Materials (SSDM), v., no., pp.0 - 0 | - |
dc.identifier.uri | http://hdl.handle.net/10203/144968 | - |
dc.language | ENG | - |
dc.title | Top-Surface Aluminized and Nitrided Hafnium Oxide Using Synthesis of Thin AlN and HfO2 Stacked Layer | - |
dc.title.alternative | Top-Surface Aluminized and Nitrided Hafnium Oxide Using Synthesis of Thin AlN and HfO2 Stacked Layer | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 0 | - |
dc.citation.endingpage | 0 | - |
dc.citation.publicationname | Conf. on Solid State Devices and Materials (SSDM) | - |
dc.identifier.conferencecountry | Japan | - |
dc.identifier.conferencecountry | Japan | - |
dc.contributor.localauthor | Cho, Byung Jin | - |
dc.contributor.nonIdAuthor | Park, CS | - |
dc.contributor.nonIdAuthor | Tang, LJ | - |
dc.contributor.nonIdAuthor | Wang, W | - |
dc.contributor.nonIdAuthor | Kwong, DL | - |
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