DSpace at KOASAS
College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Rapid measurement of Step height using Confocal Differential Heterodyne Interferometry with Beam Scanning Method

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 339
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorGweon, Dae-Gab-
dc.contributor.authorCheol Song-
dc.contributor.authorTae Joong Kim-
dc.contributor.authorHyung Suck Cho-
dc.date.accessioned2013-03-18T04:19:00Z-
dc.date.available2013-03-18T04:19:00Z-
dc.date.created2012-02-06-
dc.date.issued2005-11-05-
dc.identifier.citationISNM2005, The 3rd International Symposium on Nanomanufacturing, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/144689-
dc.languageENG-
dc.titleRapid measurement of Step height using Confocal Differential Heterodyne Interferometry with Beam Scanning Method-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameISNM2005, The 3rd International Symposium on Nanomanufacturing-
dc.identifier.conferencecountryGreece-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorCheol Song-
dc.contributor.nonIdAuthorTae Joong Kim-
dc.contributor.nonIdAuthorHyung Suck Cho-
Appears in Collection
ME-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0