Metal nanocrystals synthesized with a micellar template based on a diblock copolymer for three-dimensional nonvolatile memory

Abstract

Metal nanocrystals synthesized with a micellar template were applied for three-dimensional vertical floating gate memory devices. Using a highly ordered micellar template formed with a diblock copolymer, we produced cobalt (Co) nanocrystals with a uniform size and spatial distribution on a planar surface and a sidewall surface. The hydrogen annealing effects were investigated in terms of memory performance. The fabricated vertical floating gate memory with Co nanocrystals annealed with hydrogen showed a memory window with a voltage greater than 1 V and a retention time characteristic that preserves more than 60% of the initial charge after ten years. (C) 2008 American Institute of Physics.