Main chain scission photoresist for 193-nm lithography

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 367
  • Download : 0
DC FieldValueLanguage
dc.contributor.authorKim, Yuna-
dc.contributor.authorKim, Jin-Baek-
dc.date.accessioned2013-03-18T03:11:23Z-
dc.date.available2013-03-18T03:11:23Z-
dc.date.created2012-02-06-
dc.date.issued2004-10-
dc.identifier.citation대한화학회 2004년도 추계 학술회의 , v., no., pp.0 - 0-
dc.identifier.urihttp://hdl.handle.net/10203/144199-
dc.languageENG-
dc.publisher대한화학회-
dc.titleMain chain scission photoresist for 193-nm lithography-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage0-
dc.citation.endingpage0-
dc.citation.publicationname대한화학회 2004년도 추계 학술회의-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorKim, Jin-Baek-
dc.contributor.nonIdAuthorKim, Yuna-
Appears in Collection
CH-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0