A Transient State Analysis of Dual-Armed Cluster-tools with Wafer Delay Constraints
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Tae-Kyu | - |
| dc.contributor.author | Lee, Tae-Eog | - |
| dc.date.accessioned | 2013-03-18T02:57:57Z | - |
| dc.date.available | 2013-03-18T02:57:57Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2005-10-01 | - |
| dc.identifier.citation | MASM, v., no., pp.1 - 6 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/144147 | - |
| dc.language | ENG | - |
| dc.title | A Transient State Analysis of Dual-Armed Cluster-tools with Wafer Delay Constraints | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 1 | - |
| dc.citation.endingpage | 6 | - |
| dc.citation.publicationname | MASM | - |
| dc.identifier.conferencecountry | Singapore | - |
| dc.identifier.conferencecountry | Singapore | - |
| dc.contributor.localauthor | Lee, Tae-Eog | - |
| dc.contributor.nonIdAuthor | Kim, Tae-Kyu | - |
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