The Effect of Composition and Annealing Environment on Formation of Nanocrystal Si Memory using ECR-PECVD-Deposited Silicon-Rich Silicon Oxide
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cha, Daigil | - |
| dc.contributor.author | Shin, JungHoon | - |
| dc.contributor.author | Jeong, Soo-Hwan | - |
| dc.contributor.author | Cha, Young Kwan | - |
| dc.contributor.author | Yoo, In K. | - |
| dc.date.accessioned | 2013-03-18T00:08:51Z | - |
| dc.date.available | 2013-03-18T00:08:51Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004 | - |
| dc.identifier.citation | Materials Research Society Fall, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/143049 | - |
| dc.language | ENG | - |
| dc.title | The Effect of Composition and Annealing Environment on Formation of Nanocrystal Si Memory using ECR-PECVD-Deposited Silicon-Rich Silicon Oxide | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Materials Research Society Fall | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Shin, JungHoon | - |
| dc.contributor.nonIdAuthor | Cha, Daigil | - |
| dc.contributor.nonIdAuthor | Jeong, Soo-Hwan | - |
| dc.contributor.nonIdAuthor | Cha, Young Kwan | - |
| dc.contributor.nonIdAuthor | Yoo, In K. | - |
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