A shunt-type RF MEMS switch at 3.3V operation actauted by Lorentz force and electrostatic hold
- Issue Date
- 2005-06-05
- Language
- ENG
- Citation
13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, v.1, pp.1051 - 1054
- Appears in Collection
- RIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
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