Soft-imprint technique for 3D microstructures using poly(dimethylsiloxane) mold combined with a screen mask
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Choi, W.M. | - |
| dc.contributor.author | Park, OOk | - |
| dc.date.accessioned | 2013-03-17T23:28:50Z | - |
| dc.date.available | 2013-03-17T23:28:50Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004-11-08 | - |
| dc.identifier.citation | Advanced Microlithography Technologies, v.5645, no., pp.365 - 371 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/142845 | - |
| dc.language | ENG | - |
| dc.title | Soft-imprint technique for 3D microstructures using poly(dimethylsiloxane) mold combined with a screen mask | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-20044365263 | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 5645 | - |
| dc.citation.beginningpage | 365 | - |
| dc.citation.endingpage | 371 | - |
| dc.citation.publicationname | Advanced Microlithography Technologies | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Park, OOk | - |
| dc.contributor.nonIdAuthor | Choi, W.M. | - |
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