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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

In-situ control of nitrogen content and the effect on PL properties of SiNx films grown by ion beam sputter deposition

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dc.contributor.authorKim, K.J.-
dc.contributor.authorMoon, D.W.-
dc.contributor.authorYang, M.-S.-
dc.contributor.authorShin, JungHoon-
dc.date.accessioned2013-03-17T10:46:36Z-
dc.date.available2013-03-17T10:46:36Z-
dc.date.created2012-02-06-
dc.date.issued2004-04-13-
dc.identifier.citationNew Materials for Microphotonics, v.817, no., pp.115 - 120-
dc.identifier.issn0272-9172-
dc.identifier.urihttp://hdl.handle.net/10203/142509-
dc.languageENG-
dc.titleIn-situ control of nitrogen content and the effect on PL properties of SiNx films grown by ion beam sputter deposition-
dc.typeConference-
dc.identifier.scopusid2-s2.0-5544232329-
dc.type.rimsCONF-
dc.citation.volume817-
dc.citation.beginningpage115-
dc.citation.endingpage120-
dc.citation.publicationnameNew Materials for Microphotonics-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorShin, JungHoon-
dc.contributor.nonIdAuthorKim, K.J.-
dc.contributor.nonIdAuthorMoon, D.W.-
dc.contributor.nonIdAuthorYang, M.-S.-
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PH-Conference Papers(학술회의논문)
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