In-situ control of nitrogen content and the effect on PL properties of SiNx films grown by ion beam sputter deposition

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Issue Date
2004-04-13
Language
ENG
Citation

New Materials for Microphotonics, v.817, pp.115 - 120

ISSN
0272-9172
URI
http://hdl.handle.net/10203/142509
Appears in Collection
PH-Conference Papers(학술회의논문)
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