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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

High fill-factor micromirror array and its fabrication process

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Jeon, J.-W. / Kim, D.-H. / Yoon, Jun-Boresearcher / Lim, Koeng Suresearcher
Issue Date
2005-08-01
Language
ENG
Citation

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, pp.53 - 54

URI
http://hdl.handle.net/10203/142448
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EE-Conference Papers(학술회의논문)
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