Pitch measurement and calibration using atomic force microscope

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dc.contributor.authorJin, J-
dc.contributor.authorKim, SC-
dc.contributor.authorKim, Seung-Woo-
dc.date.accessioned2013-03-17T10:16:25Z-
dc.date.available2013-03-17T10:16:25Z-
dc.date.created2012-02-06-
dc.date.issued2003-11-27-
dc.identifier.citation한국정밀공학회 한일심포지엄, v., no., pp.313 - 316-
dc.identifier.urihttp://hdl.handle.net/10203/142333-
dc.languageENG-
dc.titlePitch measurement and calibration using atomic force microscope-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage313-
dc.citation.endingpage316-
dc.citation.publicationname한국정밀공학회 한일심포지엄-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorJin, J-
dc.contributor.nonIdAuthorKim, SC-
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ME-Conference Papers(학술회의논문)
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