DSpace at KOASAS
College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

High Precision Measurement of 3D Profile Using Confocal Differential Heterodyne Interferometer

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 380
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorGweon, Dae-Gab-
dc.contributor.authorKim, TJ-
dc.contributor.authorLee, SW-
dc.date.accessioned2013-03-17T09:34:47Z-
dc.date.available2013-03-17T09:34:47Z-
dc.date.created2012-02-06-
dc.date.issued2004-11-03-
dc.identifier.citation2nd International Symposium on Nano-manufacturing, v., no., pp.527 - 529-
dc.identifier.urihttp://hdl.handle.net/10203/142080-
dc.languageENG-
dc.titleHigh Precision Measurement of 3D Profile Using Confocal Differential Heterodyne Interferometer-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage527-
dc.citation.endingpage529-
dc.citation.publicationname2nd International Symposium on Nano-manufacturing-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorKim, TJ-
dc.contributor.nonIdAuthorLee, SW-
Appears in Collection
ME-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0