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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Experimental Study on Adhesion Between Mold and Resist in Imprint Lithography

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dc.contributor.authorKim, KS-
dc.contributor.authorKang, JH-
dc.contributor.authorKim, Kyung-Woong-
dc.date.accessioned2013-03-17T07:32:43Z-
dc.date.available2013-03-17T07:32:43Z-
dc.date.created2012-02-06-
dc.date.issued2005-06-23-
dc.identifier.citationInternational Conference on Manufacturing, Machine Design and Tribology, v., no., pp.291 --
dc.identifier.urihttp://hdl.handle.net/10203/141159-
dc.languageENG-
dc.titleExperimental Study on Adhesion Between Mold and Resist in Imprint Lithography-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage291-
dc.citation.publicationnameInternational Conference on Manufacturing, Machine Design and Tribology-
dc.identifier.conferencecountryJapan-
dc.identifier.conferencecountryJapan-
dc.contributor.localauthorKim, Kyung-Woong-
dc.contributor.nonIdAuthorKim, KS-
dc.contributor.nonIdAuthorKang, JH-
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ME-Conference Papers(학술회의논문)
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