진동 둔감 광 간섭계를 이용한 실리콘 웨이퍼 표면형상 측정Profile measurements of silicon wafers using a vibration-desensitized optical interferometer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김승우 | - |
| dc.contributor.author | 권택민 | - |
| dc.contributor.author | 김학용 | - |
| dc.date.accessioned | 2013-03-17T07:08:30Z | - |
| dc.date.available | 2013-03-17T07:08:30Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2006-02-09 | - |
| dc.identifier.citation | 한국광학회 2006년도 동계학술발표회, v., no., pp.111 - 112 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/140968 | - |
| dc.language | KOR | - |
| dc.publisher | 한국광학회 | - |
| dc.title | 진동 둔감 광 간섭계를 이용한 실리콘 웨이퍼 표면형상 측정 | - |
| dc.title.alternative | Profile measurements of silicon wafers using a vibration-desensitized optical interferometer | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 111 | - |
| dc.citation.endingpage | 112 | - |
| dc.citation.publicationname | 한국광학회 2006년도 동계학술발표회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | 권택민 | - |
| dc.contributor.nonIdAuthor | 김학용 | - |
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