Fabrication of three-dimensional SiCN ceramic structures using a newly two-photon sensitive inoganic polymer
- Publisher
- 한국 MEMS 학회
- Issue Date
- 2006-04-06
- Language
- ENG
- Citation
한국 MEMS학회 학술대회 , no.0, pp.0 - 0
- Appears in Collection
- ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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