고분자 분산형 액정막을 이용한 새로운 3차원 리소그래피 기술

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Issue Date
2006-02-23
Language
KOR
Citation

제13회 한국반도체 학술대회, pp.785 - 786

URI
http://hdl.handle.net/10203/140511
Appears in Collection
EE-Conference Papers(학술회의논문)
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