Linear stage의 진동 특성 연구A Study on Vibration Characteristics of the Linear stage for CCD

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dc.contributor.author이문석-
dc.contributor.author김병찬-
dc.contributor.author박영진-
dc.date.accessioned2013-03-17T05:55:10Z-
dc.date.available2013-03-17T05:55:10Z-
dc.date.created2012-02-06-
dc.date.issued2006-10-18-
dc.identifier.citation한국정밀공학회 2006년도 추계학술대회, v.6, no., pp.645 - 646-
dc.identifier.urihttp://hdl.handle.net/10203/140427-
dc.languageKOR-
dc.publisher한국정밀공학회-
dc.titleLinear stage의 진동 특성 연구-
dc.title.alternativeA Study on Vibration Characteristics of the Linear stage for CCD-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.volume6-
dc.citation.beginningpage645-
dc.citation.endingpage646-
dc.citation.publicationname한국정밀공학회 2006년도 추계학술대회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor박영진-
dc.contributor.nonIdAuthor이문석-
dc.contributor.nonIdAuthor김병찬-
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ME-Conference Papers(학술회의논문)
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