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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch

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dc.contributor.authorKim, J.-H.-
dc.contributor.authorLee, H.-K.-
dc.contributor.authorKim, B.-I.-
dc.contributor.authorJeon, J.-W.-
dc.contributor.authorYoon, Jun-Bo-
dc.contributor.authorYoon, E.-
dc.date.accessioned2013-03-17T05:47:04Z-
dc.date.available2013-03-17T05:47:04Z-
dc.date.created2012-02-06-
dc.date.issued2003-01-19-
dc.identifier.citationIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, v., no., pp.259 - 262-
dc.identifier.urihttp://hdl.handle.net/10203/140379-
dc.languageENG-
dc.titleA high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch-
dc.typeConference-
dc.identifier.scopusid2-s2.0-0038156068-
dc.type.rimsCONF-
dc.citation.beginningpage259-
dc.citation.endingpage262-
dc.citation.publicationnameIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems-
dc.identifier.conferencecountryJapan-
dc.identifier.conferencecountryJapan-
dc.contributor.localauthorYoon, Jun-Bo-
dc.contributor.localauthorYoon, E.-
dc.contributor.nonIdAuthorKim, J.-H.-
dc.contributor.nonIdAuthorLee, H.-K.-
dc.contributor.nonIdAuthorKim, B.-I.-
dc.contributor.nonIdAuthorJeon, J.-W.-
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EE-Conference Papers(학술회의논문)RIMS Conference Papers
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