Microstructual study on mechanical properties of MEMS materials

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dc.contributor.authorHong, Soon Hyung-
dc.date.accessioned2013-03-17T05:17:29Z-
dc.date.available2013-03-17T05:17:29Z-
dc.date.created2012-02-06-
dc.date.issued2005-05-26-
dc.identifier.citationIn celebration of the 60th anniversary proceedings of the KSME 2005 spring annual meeting, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/140161-
dc.languageKOR-
dc.titleMicrostructual study on mechanical properties of MEMS materials-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameIn celebration of the 60th anniversary proceedings of the KSME 2005 spring annual meeting-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorHong, Soon Hyung-
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MS-Conference Papers(학술회의논문)
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