Molecular resist with adamantane core for 193-nm lithography
- Publisher
- KAIST-성균관대 분자과학사업단
- Issue Date
- 2005-02-01
- Language
- ENG
- Citation
제7회 BK21 분자과학사업단 심포지움, pp.0 - 0
- Appears in Collection
- CH-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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