A new three-dimensional lithography using Polymer Dispersed Liquid Crystal (PDLC) films

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Issue Date
2006-01-22
Language
ENG
Citation

19th IEEE International Conference on Micro Electro Mechanical Systems, pp.110 - 113

URI
http://hdl.handle.net/10203/139244
Appears in Collection
EE-Conference Papers(학술회의논문)
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