평면 XY 스테이지용 공기베어링 안내면 오차 평가The evaluation of aerostatic guide-ways for planar XY stage
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 황주호 | - |
| dc.contributor.author | 박천홍 | - |
| dc.contributor.author | 김승우 | - |
| dc.date.accessioned | 2013-03-17T03:07:41Z | - |
| dc.date.available | 2013-03-17T03:07:41Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2006 | - |
| dc.identifier.citation | 한국정밀공학회 2006년 춘계학술대회, v., no., pp.141 - 142 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/139226 | - |
| dc.description.abstract | This paper describes estimation method for 2D position error of planar XY stage from measured profiles of guide-ways. The XY stage usually moves along its guide ways. The motion error of each stage has effect on 2D position errors of XY stages and affected mainly by profiles of guide-ways. To estimate 2D position error and flatness of stages, the profiles of guide-ways were measured and used in motion error estimation. | - |
| dc.language | KOR | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | 평면 XY 스테이지용 공기베어링 안내면 오차 평가 | - |
| dc.title.alternative | The evaluation of aerostatic guide-ways for planar XY stage | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 141 | - |
| dc.citation.endingpage | 142 | - |
| dc.citation.publicationname | 한국정밀공학회 2006년 춘계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | 황주호 | - |
| dc.contributor.nonIdAuthor | 박천홍 | - |
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