Fabrication of three-demensional SiCN ceramic microstructures using soft-mold lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yang, Dong-Yol | - |
| dc.contributor.author | Yoon, Jun-Bo | - |
| dc.contributor.author | Lim, T. W. | - |
| dc.contributor.author | Park, S. H. | - |
| dc.contributor.author | Pham, A. T. | - |
| dc.contributor.author | Kim, D. P. | - |
| dc.contributor.author | Chan, S. I. | - |
| dc.date.accessioned | 2013-03-17T02:54:42Z | - |
| dc.date.available | 2013-03-17T02:54:42Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2005-10-26 | - |
| dc.identifier.citation | Proc. Nanoeng, Symposium, v., no., pp.305 - 308 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/139131 | - |
| dc.language | ENG | - |
| dc.title | Fabrication of three-demensional SiCN ceramic microstructures using soft-mold lithography | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 305 | - |
| dc.citation.endingpage | 308 | - |
| dc.citation.publicationname | Proc. Nanoeng, Symposium | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Yang, Dong-Yol | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.nonIdAuthor | Lim, T. W. | - |
| dc.contributor.nonIdAuthor | Park, S. H. | - |
| dc.contributor.nonIdAuthor | Pham, A. T. | - |
| dc.contributor.nonIdAuthor | Kim, D. P. | - |
| dc.contributor.nonIdAuthor | Chan, S. I. | - |
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