Effects of adhesion and friction on the pattern transfer in nanoimprint lithography: A molecular dynamics simulation
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kang J.-H. | - |
| dc.contributor.author | Kim K.-S. | - |
| dc.contributor.author | Kim, Kyung-Woong | - |
| dc.date.accessioned | 2013-03-17T02:36:47Z | - |
| dc.date.available | 2013-03-17T02:36:47Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2005-09-12 | - |
| dc.identifier.citation | 2005 World Tribology Congress III, v., no., pp.773 - 774 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/138957 | - |
| dc.language | ENG | - |
| dc.title | Effects of adhesion and friction on the pattern transfer in nanoimprint lithography: A molecular dynamics simulation | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-33144486164 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 773 | - |
| dc.citation.endingpage | 774 | - |
| dc.citation.publicationname | 2005 World Tribology Congress III | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Kim, Kyung-Woong | - |
| dc.contributor.nonIdAuthor | Kang J.-H. | - |
| dc.contributor.nonIdAuthor | Kim K.-S. | - |
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