AFM을 이용한 3 µm 피치 측정 및 분석3 µm Pitch Measurement and Analysis using AFM
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김승철 | - |
| dc.contributor.author | 진종한 | - |
| dc.contributor.author | 김승우 | - |
| dc.date.accessioned | 2013-03-17T02:12:14Z | - |
| dc.date.available | 2013-03-17T02:12:14Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2003-10 | - |
| dc.identifier.citation | 한국정밀공학회 2003년 추계학술대회, v.3, no., pp.214 - 217 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/138734 | - |
| dc.language | KOR | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | AFM을 이용한 3 µm 피치 측정 및 분석 | - |
| dc.title.alternative | 3 µm Pitch Measurement and Analysis using AFM | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 3 | - |
| dc.citation.beginningpage | 214 | - |
| dc.citation.endingpage | 217 | - |
| dc.citation.publicationname | 한국정밀공학회 2003년 추계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | 김승철 | - |
| dc.contributor.nonIdAuthor | 진종한 | - |
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