블록 공중합체 박막내부에 기억 소자용 자성 금속 함침Magentic metal inclusion for memory devices in the block copolymer thin films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최대근 | - |
| dc.contributor.author | 권기영 | - |
| dc.contributor.author | 정종률 | - |
| dc.contributor.author | 정희태 | - |
| dc.contributor.author | 신성철 | - |
| dc.contributor.author | 양승만 | - |
| dc.date.accessioned | 2013-03-17T00:08:33Z | - |
| dc.date.available | 2013-03-17T00:08:33Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-10-01 | - |
| dc.identifier.citation | 한국화학공학회 추계학술발표회, v., no., pp.0 - 0 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/137607 | - |
| dc.description.abstract | In summary, we successfully synthesized well ordered holes with P(S-MMA) polymer template. In addition, we impregnated magnetic metal into polymer template. By RIE and ion milling, we successfully transferred this pattern into silicon wafer substrate. Also, we anticipate this skill can be applied so many application such as DNA chip, storage memory device, and advanced nano-lithography, and so on. | - |
| dc.language | KOR | - |
| dc.publisher | 한국화학공학회 | - |
| dc.title | 블록 공중합체 박막내부에 기억 소자용 자성 금속 함침 | - |
| dc.title.alternative | Magentic metal inclusion for memory devices in the block copolymer thin films | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 0 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | 한국화학공학회 추계학술발표회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 양승만 | - |
| dc.contributor.nonIdAuthor | 최대근 | - |
| dc.contributor.nonIdAuthor | 권기영 | - |
| dc.contributor.nonIdAuthor | 정종률 | - |
| dc.contributor.nonIdAuthor | 정희태 | - |
| dc.contributor.nonIdAuthor | 신성철 | - |
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