DC Field | Value | Language |
---|---|---|
dc.contributor.author | 유승봉 | - |
dc.contributor.author | 장인철 | - |
dc.contributor.author | 김승우 | - |
dc.date.accessioned | 2013-03-16T23:59:30Z | - |
dc.date.available | 2013-03-16T23:59:30Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2000 | - |
dc.identifier.citation | 한국정밀공학회 2000년 춘계학술대회 , v., no., pp.603 - 606 | - |
dc.identifier.uri | http://hdl.handle.net/10203/137534 | - |
dc.description.abstract | This dissertation is concerned with ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on an precision xy-stage whose lateral motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed in this investigation is capable of providing a repeatability of 50 nanometers with a ±3σ uncertainty of 300 nanometers. Thermal disturbance is found the most significant factor that should be precisely controlled for accurate measurement. | - |
dc.language | KOR | - |
dc.publisher | 한국정밀공학회 | - |
dc.title | 비구면 렌즈의 형상 측정을 위한 접촉식 프로브 기술 개발 | - |
dc.title.alternative | Contact Probing Technique for Profile Measurement of Aspheric Lenses | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 603 | - |
dc.citation.endingpage | 606 | - |
dc.citation.publicationname | 한국정밀공학회 2000년 춘계학술대회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 김승우 | - |
dc.contributor.nonIdAuthor | 유승봉 | - |
dc.contributor.nonIdAuthor | 장인철 | - |
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