비구면 렌즈의 형상 측정을 위한 접촉식 프로브 기술 개발Contact Probing Technique for Profile Measurement of Aspheric Lenses

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This dissertation is concerned with ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on an precision xy-stage whose lateral motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed in this investigation is capable of providing a repeatability of 50 nanometers with a ±3σ uncertainty of 300 nanometers. Thermal disturbance is found the most significant factor that should be precisely controlled for accurate measurement.
Publisher
한국정밀공학회
Issue Date
2000
Language
KOR
Citation

한국정밀공학회 2000년 춘계학술대회 , pp.603 - 606

URI
http://hdl.handle.net/10203/137534
Appears in Collection
ME-Conference Papers(학술회의논문)
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