다이아몬드 선삭 가공기의 진단을 위한 대영역 표면 해석

Abstract

Diamond turning machines for manufacture of precision optics require deliberate diagnosis to ensure that all the machine elements are properly operating, kinematically, dynamically and thermally, to produce demanded work qualities. One effective way is to directly inspect topographical features of work surfaces that have been carefully generated with prescribed machining conditions intended to exaggerate faulty consequences of any ill-operating machine elements. In this research, a very-large-scale Phase measuring interferometric system that has been developed for years at Korea Advanced Institute of Science and Technology is used to fulfill the metrological requirements fur the surface analysis. A special stitching technique is used to extend the measuring range, which integrates all the patches that are separately sampled over the whole surface while moving the stage. Then, the measured surface profile is analyzed to releated the machine error sources. For this, zernike polynomial fitting is used together with the wavelet filter and the fourier transform. Experimental results showed that the suggested technique in this study is very effective in diagnosing actual diamond turning machines