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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

High speed MEMS scanning mirror with vertical combdrive

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dc.contributor.authorWada, H.-
dc.contributor.authorLee, D.-
dc.contributor.authorYu, Kyoungsik-
dc.contributor.authorKrishnamoorthy-
dc.contributor.authorZappe, S.-
dc.contributor.authorSolgaard, O.-
dc.date.accessioned2013-03-16T23:52:14Z-
dc.date.available2013-03-16T23:52:14Z-
dc.date.created2012-06-28-
dc.date.issued2002-
dc.identifier.citationInternational Conference on Optics-Photonics Design and Fabrication, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/137481-
dc.languageENG-
dc.publisherInternational Conference on Optics-Photonics Design and Fabrication-
dc.titleHigh speed MEMS scanning mirror with vertical combdrive-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameInternational Conference on Optics-Photonics Design and Fabrication-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorYu, Kyoungsik-
dc.contributor.nonIdAuthorWada, H.-
dc.contributor.nonIdAuthorLee, D.-
dc.contributor.nonIdAuthorKrishnamoorthy-
dc.contributor.nonIdAuthorZappe, S.-
dc.contributor.nonIdAuthorSolgaard, O.-
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EE-Conference Papers(학술회의논문)
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