Effect of bounce resonance heating on Electron Energy Distribution Function in a small Inductively Coupled Plasma

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It is found that with increasing power, the measured electron energy distribution by Langmuir probe evolves into a Druyvesteyn-like electron energy distribution in the low-pressure regime of 1mTorr in a small inductively coupled plasma. Electron bounce resonance is introduced to explain the transition of the electron energy distribution against the rf power, The energy diffusion coefficients which determine the shape of the electron energy distribution in elastic range are calculated with and without electron bounce resonance. This electron energy distribution transition is well explained by the electron bounce resonance.
Publisher
한국진공학회
Issue Date
1999-07
Language
ENG
Citation

한국진공학회 제17회 학술발표회

URI
http://hdl.handle.net/10203/137211
Appears in Collection
PH-Conference Papers(학술회의논문)
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