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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Conference Papers(학술회의논문)

Wafer polishing performance of silica slurries with silica particles grown by sol-gel method

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Bae, SH / So, JH / Yang, Seung-Manresearcher / Kim, DH
Issue Date
2000
Language
ENG
Citation

Material Research Society 2000 Spring Meeting

URI
http://hdl.handle.net/10203/136365
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CBE-Conference Papers(학술회의논문)
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