Chemically Amplified Resists based on the Norbornene Copolymers with Steroid Derivatives
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.contributor.author | Lee, Bum-Wook | - |
| dc.contributor.author | Kang, Jae-Sung | - |
| dc.date.accessioned | 2013-03-16T21:33:45Z | - |
| dc.date.available | 2013-03-16T21:33:45Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999-01 | - |
| dc.identifier.citation | SPIE-The International Society for Optical Engineering, v., no., pp.36 - 43 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/136111 | - |
| dc.language | ENG | - |
| dc.publisher | SPIE | - |
| dc.title | Chemically Amplified Resists based on the Norbornene Copolymers with Steroid Derivatives | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 36 | - |
| dc.citation.endingpage | 43 | - |
| dc.citation.publicationname | SPIE-The International Society for Optical Engineering | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | Lee, Bum-Wook | - |
| dc.contributor.nonIdAuthor | Kang, Jae-Sung | - |
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